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Dear Fabian,
I am sorry if this suggestion is repeated or you have already thought about it. For our Krios, the only way of getting a consistent defocus at higher tilts is setting addAF = True
and putting extra dose on the tracking position.
Is there a way to define an autofocus position off the first target so we don't have to sacrifice that one target (per lamella)? This could improve our throughput even further!
Thanks in advance.
Hamid
3F22
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